Mesoporous silicon oxynitride thin films†
Abstract
Highly-ordered, pore-modified with amine groups, and glasslike mesoporous silicon oxynitride thin films were prepared by heat treatment of as-synthesized mesoporous
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Supplementary files
Article information
- Article type
- Communication
- Submitted
- 29 Sep 2005
- Accepted
- 15 Dec 2005
- First published
- 19 Jan 2006
Chem. Commun., 2006, 900-902
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Mesoporous silicon oxynitride thin films
J. Wang and Q. Liu, Chem. Commun., 2006, 900 DOI: 10.1039/B513854J
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