Fabrication of plastic microchips by hot embossing
Abstract
Plastic microchips with microchannels (100 µm wide, 40 µm deep) of varying designs have been fabricated in polymethylmethacrylate by a hot embossing process using an electroform tool produced starting with silicon chip masters. Hot-embossed chips were capped with a polymethylmethacrylate top using a proprietary