Issue 6, 2002

Abstract

TEA CO2 laser induced ablation of solid amorphous silicon monoxide in H2 and H2O atmosphere results in deposition of hydrogenated SiOx films, which reveals that ablated silicon monoxide fragments are reactive towards H2 and H2O. The films analyzed by FTIR and XP spectroscopy are revealed as rich in H, composed of Si0 and several SixOyHz configurations and containing both Si–OH and Si–H bonds. The films produced in H2O have (Si)H mostly bonded in the (O3)Si–H unit and those produced in H2 have H attached to Si which is bonded to 1–3 oxygen atoms.

Graphical abstract: IR laser-induced reactive ablation of silicon monoxide in hydrogen and water atmosphere

Article information

Article type
Paper
Submitted
03 Jan 2002
Accepted
04 Apr 2002
First published
26 Apr 2002

J. Mater. Chem., 2002,12, 1800-1805

IR laser-induced reactive ablation of silicon monoxide in hydrogen and water atmosphere

V. Dřínek, Z. Bastl, J. Šubrt, A. Yabe and J. Pola, J. Mater. Chem., 2002, 12, 1800 DOI: 10.1039/B200058J

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