Abstract

A hybrid model is developed for a microsecond pulsed analytical glow discharge. It consists of a Monte Carlo model for the fast electrons, a fluid model for the slow electrons and argon ions, coupled to Poisson's equation for the electric field calculation, and a Monte Carlo model for the fast argon ions and atoms in the cathode dark space (CDS). Typical results of this model include the electrical characteristics (i.e., potential, current, power, as well as the gas temperature), the electric potential distributions, the argon ion density profiles, and the rates of various ionization and recombination mechanisms. These results are presented as a function of time during and after the pulse. Comparison with experimental data has been made for the electrical characteristics (for which experimental data were available), and good agreement has been reached. This suggests that the other calculated quantities, for which no experimental data are available, are also correctly predicted in the model.