IR laser-induced decomposition of 2-chloroethenylsilane for chemical vapour deposition of Si/C phases
Abstract
Infrared multiphoton decomposition of 2-chloroethenylsilane is dominated by dehydrochlorination and by decomposition of the intermediary ethynylsilane, and it affords a solid material consisting of an Si/C/H polymer and silicon carbide. The content of the latter can be increased by using a high-energy fluence of laser radiation.