Issue 6, 1996

IR laser-induced decomposition of 2-chloroethenylsilane for chemical vapour deposition of Si/C phases

Abstract

Infrared multiphoton decomposition of 2-chloroethenylsilane is dominated by dehydrochlorination and by decomposition of the intermediary ethynylsilane, and it affords a solid material consisting of an Si/C/H polymer and silicon carbide. The content of the latter can be increased by using a high-energy fluence of laser radiation.

Article information

Article type
Paper

J. Mater. Chem., 1996,6, 975-981

IR laser-induced decomposition of 2-chloroethenylsilane for chemical vapour deposition of Si/C phases

M. Santos, L. Díaz, Z. Bastl, V. Hulínský, M. Urbanová, J. Vítek and J. Pola, J. Mater. Chem., 1996, 6, 975 DOI: 10.1039/JM9960600975

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Spotlight

Advertisements