Dimers and tetramers of SiCl in a molecular beam from a heterogeneous, intermediate-pressure reactor

Abstract

The molecular-beam flux from the reaction between trichlorosilane SiHCl₃ and a mixture of liquid sodium and potassium has been studied by mass spectrometry. The carrier gas was He, at a pressure of 100–700 mbar. It is demonstrated that various heterogeneous reactions take place in the reactor at 400–600 K. The formation of the molecules Si₂Cl₂ and Si₄Cl₄ is observed, and the cracking pattern of the dimeric molecule is measured.