Issue 13, 2020, Issue in Progress

Real-time and non-destructive hydrocarbon gas sensing using mid-infrared integrated photonic circuits

Abstract

A chip-scale mid-infrared (mid-IR) sensor was developed for hydrocarbon gas detection. The sensor consisted of amorphous Si (a-Si) optical ridge waveguides that were fabricated by complementary metal–oxide–semiconductor (CMOS) processes. The waveguide exhibited a sharp fundamental mode through λ = 2.70 to 3.50 μm. Its sensing performance was characterized by measuring methane and acetylene. From the spectral mode attenuation, the characteristic C–H absorption bands associated with methane and acetylene were found at λ = 3.29–3.33 μm and λ = 3.00–3.06 μm, respectively. In addition, real-time methane and acetylene concentration monitoring was demonstrated at λ = 3.02 and 3.32 μm. Hence, the mid-IR waveguide sensor enabled an accurate and instantaneous analysis of hydrocarbon gas mixtures.

Graphical abstract: Real-time and non-destructive hydrocarbon gas sensing using mid-infrared integrated photonic circuits

Article information

Article type
Paper
Submitted
02 Dec 2019
Accepted
07 Feb 2020
First published
19 Feb 2020
This article is Open Access
Creative Commons BY-NC license

RSC Adv., 2020,10, 7452-7459

Real-time and non-destructive hydrocarbon gas sensing using mid-infrared integrated photonic circuits

T. Jin, J. Zhou and P. T. Lin, RSC Adv., 2020, 10, 7452 DOI: 10.1039/C9RA10058J

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