A bottom-up strategy toward a flexible vanadium dioxide/silicon nitride composite film with infrared sensing performance

Abstract

Vanadium dioxide (VO₂) attracts great attention due to its well-known metal-to-insulator transition. However, traditional VO₂ films grown on rigid substrates are inflexible, which limits their applications. In this work, we successfully prepared VO₂/silicon nitride (VO₂/SN) composite films by a simple template method. The VO₂/SN film shows high flexibility, strong infrared absorption, and drastic resistance change (>10³) induced by the phase transition. The application of the VO₂/SN film is presented by infrared sensing, which shows a high responsivity (720 V W⁻¹) and short response time (409 ms).