Issue 73, 2019
From the journal:

Chemical Communications

Visualizing anisotropy in the surface oxidation of germanium by wet etching of patterned nanowedges: proof of concept†

Graniel Harne A. Abrenica, ORCID logo *ab   Mikhail V. Lebedev, ORCID logo c   Antoine Pacco, ORCID logo b   Wolfram Calvet,d   Thomas Mayer ORCID logo d  and  Dennis H. van Dorpb  

* Corresponding authors

a Department of Chemistry, Katholieke Universiteit Leuven, B-3001 Leuven, Belgium

b Imec, B-3001 Leuven, Belgium
E-mail: Graniel.Abrenica@imec.be

c Ioffe Institute, St. Petersburg, Russia

d Institute of Materials Science, Darmstadt University of Technology, Darmstadt, Germany

Abstract

We study the anisotropy in surface oxidation for Ge(100) and (110) in HCl/H2O2 solution complemented by synchrotron X-ray photoemission spectroscopy (SXPS) measurements integrated with an in situ etching chamber. Visual anisotropic demonstration is confirmed by lithographic Ge nanowedges.

Graphical abstract: Visualizing anisotropy in the surface oxidation of germanium by wet etching of patterned nanowedges: proof of concept

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Article information

DOI
https://doi.org/10.1039/C9CC05376J
Article type
Communication
Submitted
12 Jul 2019
Accepted
16 Aug 2019
First published
16 Aug 2019

Chem. Commun., 2019,55, 10864-10867

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Visualizing anisotropy in the surface oxidation of germanium by wet etching of patterned nanowedges: proof of concept

G. H. A. Abrenica, M. V. Lebedev, A. Pacco, W. Calvet, T. Mayer and D. H. van Dorp, Chem. Commun., 2019, 55, 10864 DOI: 10.1039/C9CC05376J

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