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Rapid fabrication of solid-state nanopores with high reproducibility over a large area using helium ion microscope

Abstract

Fabrication of solid-state nanopores in an insulating membrane has attracted much attention for biomolecules analysis such as DNA sequencing and detection in recent years. For practical applications and device integration, the challenges include precise size control for sub 10-nm nanopore, excellent repeatability and rapid fabrication over a large area to reduce cost for mass production. Helium ion beam could provide an effective fabrication approach to produce such solid-state nanopores. It is easy to control nanopore size and reach sub 10-nm pore size with simple change of milling time with appropriate ion beam current. Here we report new results in a set of experiments demonstrating that with small range of stage automatized motion and equal mill time one can obtain good fabrication reproducibility in nanopore sizes (<10% from average). The automation in stage motion and milling time opens door for rapid mass production of nanopore chips over a wafer size.

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Publication details

The article was received on 11 Nov 2017, accepted on 29 Jan 2018 and first published on 30 Jan 2018


Article type: Paper
DOI: 10.1039/C7NR08406D
Citation: Nanoscale, 2018, Accepted Manuscript
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    Rapid fabrication of solid-state nanopores with high reproducibility over a large area using helium ion microscope

    D. Xia, C. Huynh, S. McVey, A. Kobler, L. Stern, Z. Yuan and X. S. Ling, Nanoscale, 2018, Accepted Manuscript , DOI: 10.1039/C7NR08406D

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