Issue 6, 2018

An aminopyridinato Mn(ii) compound as a novel CVD precursor for manganese-containing films

Abstract

The novel aminopyridinato Mn(II) compound has been synthesized and characterized by elemental analysis and X-ray diffraction. It was easily obtained through a conventional salt-elimination reaction. Thermal properties, including stability, volatility, transport behavior and vapor pressure, were evaluated by thermogravimetric analysis (TGA) to confirm that it is suitable for the CVD procedure. Deposition was accomplished in a hot-wall CVD reactor, verifying its ability to act as a CVD precursor for the fabrication of manganese containing films.

Graphical abstract: An aminopyridinato Mn(ii) compound as a novel CVD precursor for manganese-containing films

Supplementary files

Article information

Article type
Paper
Submitted
05 Jan 2018
Accepted
02 Feb 2018
First published
08 Feb 2018

New J. Chem., 2018,42, 4553-4558

An aminopyridinato Mn(II) compound as a novel CVD precursor for manganese-containing films

L. Du, S. Yu, X. Liu and Y. Ding, New J. Chem., 2018, 42, 4553 DOI: 10.1039/C8NJ00062J

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