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An aminopyridinato Mn(II) compound as novel CVD precursor for manganese-containing films

Abstract

The novel aminopyridinato Mn(II) compound has been synthesized and characterized by elemental analysis and x-ray diffraction. It was easily obtained through a conventional salt-elimination reaction. Thermal properties, including stability, volatility, transport behavior and vapor pressure, were evaluated by thermogravimetric analysis (TGA) to confirm that it is suitable for the CVD procedure. Deposition was accomplished in a hot-wall CVD reactor, verifying the ability of it as CVD precursor for the fabrication of manganese containing films.

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Publication details

The article was received on 05 Jan 2018, accepted on 02 Feb 2018 and first published on 08 Feb 2018


Article type: Paper
DOI: 10.1039/C8NJ00062J
Citation: New J. Chem., 2018, Accepted Manuscript
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    An aminopyridinato Mn(II) compound as novel CVD precursor for manganese-containing films

    L. Du, S. Yu, X. Liu and Y. Ding, New J. Chem., 2018, Accepted Manuscript , DOI: 10.1039/C8NJ00062J

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