Jump to main content
Jump to site search


Characterization of gold coated ceramics by radiofrequency pulsed glow discharge – time of flight mass spectrometry

Abstract

Despite it is well known that glow discharge (GD) spectrometry can be used for characterization of both conductive and non-conductive materials, applications on insulators is limited and can been challenging when aiming at the analysis of thick samples. Voltage drop across the material can lead to low power deposition and so to a non efficient sputtering. In this article successful depth profile characterization studies on 6 mm thick ceramic samples coated with a thin (in the nm range) gold layer by means of a commercially available radiofrequency pulsed GD (RF-PGD) coupled time of flight mass spectrometry (RF-PGD-TOFMS) instrument is presented. Careful optimization of the operational conditions was required to achieve proper sputtering of the insulator substrate. 30 W of applied rf power, 95 Pa of pressure in the GD chamber and a pulse width of 500 s with a period of 1.49 ms were selected. Characterization of a set of industrially-prepared ceramic samples under different conditions was carried out. To overcome problems related with roughness of the samples, estimation of sample thickness was achieved with an alternative approach based on the use of flat glasses with known Au layer thicknesses. Results of the investigated ceramic samples have shown Au layer thicknesses ranging between 20 and 120 nm. Moreover, screening of other metallic elements within the Au thin coating was carried out, being observed the presence of Rh, Bi, Pt, Ir and Pd in the Au layer.

Back to tab navigation

Publication details

The article was received on 21 Dec 2017, accepted on 30 Jan 2018 and first published on 30 Jan 2018


Article type: Technical Note
DOI: 10.1039/C7JA00419B
Citation: J. Anal. At. Spectrom., 2018, Accepted Manuscript
  •   Request permissions

    Characterization of gold coated ceramics by radiofrequency pulsed glow discharge – time of flight mass spectrometry

    M. Bouza, L. Lobo Revilla, R. Muñiz, R. Pereiro, J. Esparza and J. A. García, J. Anal. At. Spectrom., 2018, Accepted Manuscript , DOI: 10.1039/C7JA00419B

Search articles by author

Spotlight

Advertisements