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Investigation of modified Nanopore Arrays by FIB/SEM Tomography


The investigation of electrochemical processes at the interface of two immiscible electrolyte solutions (ITIES) is of great interest for sensing applications, and serves as surrogates to study biological transport phenomena, e.g. ion channels. Besides e-beam lithography, focused ion beam (FIB) milling is an attractive method to prototype and fabricate nanopore arrays that support nanoITIES. Within this contribution, we explore the capability of FIB combined with scanning electron microscopy (SEM) tomography to visualize the actual pore structure and interfaces at silica-modified nanoporous membranes. The nanopores were also characterized by atomic force microscopy (AFM) using ultra-sharp AFM probes to determine the pore diameter, and by scanning transmission electron microscopy (STEM) and energy dispersive X-ray (EDX) spectroscopy, providing additional information on the elemental composition of deposits within the pore. Si-rich particles could be identified within the pores as well as at the orifice that had faced the organic electrolyte solution during electrochemical deposition. The prospectives of the used techniques for investigating the interface at or within FIB-milled nanopores will be discussed.

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Publication details

The article was accepted on 16 Feb 2018 and first published on 23 Feb 2018

Article type: Paper
DOI: 10.1039/C8FD00019K
Citation: Faraday Discuss., 2018, Accepted Manuscript
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    Investigation of modified Nanopore Arrays by FIB/SEM Tomography

    A. Holzinger, G. Neusser, B. J.J. Austen, A. Gamero-Quijano, G. Herzog, D. W.M. Arrigan, A. Ziegler, P. Walther and C. Kranz, Faraday Discuss., 2018, Accepted Manuscript , DOI: 10.1039/C8FD00019K

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