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Effect of laser energy on crystal structure and UV response characteristics of mix-phase MgZnO thin film deposited by PLD and the fabrication of high signal/noise ratio solar-blind UV detector based on mix-phase MgZnO at lower voltage.

Abstract

MgZnO thin films were fabricated on fused quartz substrate with Mg0.4Zn0.6O target by PLD method under different laser energy density. Cubic structure MgZnO thin films were made st 20J/cm2 and 22J/cm2 laser energy density, and the MgZnO thin films deposited along both cubic and hexagonal structure under higher laser energy density condition. When higher energy density laser was added on the MgZnO target during deposition process, the MgZnO thin film deposited more along hexagonal structure, and the Zn composition of the MgZnO thin film is higher. There are two response peaks located at solar-blind UV and visible-blind UV positions in the UV response spectrums of mix-phase MgZnO based detector deposited at laser energy over 24 J/cm2. When the deposition laser energy density increased from 24 to 30 J/cm2, the maximum UV responsivity of the mix-phase MgZnO based detector increased from 0.06A/W to 1A/W at 40V bias voltage, and the visible-blind UV response peak of the mix-phase MgZnO based detector is higher, which is reasoned from more hexagonal structure MgZnO and higher internal gain from higher density of interfaces between different structure MgZnO grains in mix-phase MgZnO thin film. At 5V bias voltage, the Ilight(230nm)/Idark ratio of the UV detector based on mix-phase MgZnO deposited at 24 J/cm2 reached 500, and the Ilight(290nm)/Idark ratio of the UV detector based on mix-phase MgZnO deposited at 26 J/cm2 reached 1100. So the UV detector based on mix-phase MgZnO thin films is sensitive to solar-blind and visible-blind UV light under strong noise background on earth when the boundaries between (111) an (200) cubic MgZnO makes obvious function in decreasing the dark current of the detectors at lower bias voltage.

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Publication details

The article was received on 18 May 2017, accepted on 11 Oct 2017 and first published on 11 Oct 2017


Article type: Paper
DOI: 10.1039/C7TC02195J
Citation: J. Mater. Chem. C, 2017, Accepted Manuscript
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    Effect of laser energy on crystal structure and UV response characteristics of mix-phase MgZnO thin film deposited by PLD and the fabrication of high signal/noise ratio solar-blind UV detector based on mix-phase MgZnO at lower voltage.

    S. Han, X.H. Ji, Q.L. An, Y.M. Lu, P.J. Cao, W.J. Liu, Y.X. Zeng, F. Jia, X. Liu and D.L. Zhu, J. Mater. Chem. C, 2017, Accepted Manuscript , DOI: 10.1039/C7TC02195J

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