Jump to main content
Jump to site search

Issue 28, 2017
Previous Article Next Article

All-sputtered, flexible, bottom-gate IGZO/Al2O3 bi-layer thin film transistors on PEN fabricated by a fully room temperature process

Author affiliations

Abstract

In this work, an innovative all-sputtered bottom-gate thin film transistor (TFT) using an amorphous InGaZnO (IGZO)/Al2O3 bi-layer channel was fabricated by fully room temperature processes on a flexible PEN substrate. A bi-layer channel consisting of 10 nm-thick IGZO and 3 nm-thick Al2O3 was clearly observed in high resolution TEM images. The chemical structure of IGZO was dependent on different sputtering modes (pulse-DC/DC/RF), which were investigated by XPS measurements. The ultrathin Al2O3 layer on IGZO showed a significant effect on enhancing the mobility, reducing the off-state current, and improving the gate-bias stability. As a result, the IGZO/Al2O3 bi-layer TFT eventually exhibited a saturation mobility of 18.5 cm2 V−1 s−1, an Ion/Ioff ratio of 107, an on-state voltage of 1.5 V and a subthreshold swing of 0.27 V decade−1, as well as good stability under NBS/PBS and bending strain. The fabrication of this TFT can be suitably transferred to large-size arrays or paper-like substrates, which is in line with the trend of display development.

Graphical abstract: All-sputtered, flexible, bottom-gate IGZO/Al2O3 bi-layer thin film transistors on PEN fabricated by a fully room temperature process

Back to tab navigation

Supplementary files

Publication details

The article was received on 11 May 2017, accepted on 16 Jun 2017 and first published on 16 Jun 2017


Article type: Paper
DOI: 10.1039/C7TC02068F
Citation: J. Mater. Chem. C, 2017,5, 7043-7050
  •   Request permissions

    All-sputtered, flexible, bottom-gate IGZO/Al2O3 bi-layer thin film transistors on PEN fabricated by a fully room temperature process

    Z. Zheng, Y. Zeng, R. Yao, Z. Fang, H. Zhang, S. Hu, X. Li, H. Ning, J. Peng, W. Xie and X. Lu, J. Mater. Chem. C, 2017, 5, 7043
    DOI: 10.1039/C7TC02068F

Search articles by author

Spotlight

Advertisements