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Carbohydrate-based Block Copolymer Systems: Directed Self-Assembly for Nanolithography Applications

Abstract

Self-assembly of block copolymers (BCPs) provides an attractive nanolithography approach, which looks especially promising for fabrication of regular structures with characteristic sizes below 10 nm. Nevertheless, directed self-assembly (DSA) and pattern transfer for BCPs with such small features remain to be a challenge. Here we demonstrate DSA of maltoheptaose-block-polystyrene (MH1,2k-b-PS4,5k) BCP system using graphoepitaxy. The BCP thin films were self-organized by a solvent vapor annealing in tetrahydrofuran (THF) and water into sub-10 nm scale cylinders of maltoheptaose (MH) block oriented horizontally or perpendicularly to the surface in polystyrene (PS) matrix. The guiding patterns for graphoepitaxy were made by electron beam lithography (EBL) and lift-off process with distance gradually varying between 0 and 200 nm. Atomic force microscope (AFM) investigation of MH1,2k-b-PS4,5k BCP DSA patterns revealed good ordering of vertical and horizontal cylindrical MH arrays for DSA lines with 150 – 200 nm separation. Reactive ion etching (RIE) of MH1,2k and PS4,5k thin films in O2 and CF4 plasma showed up to 14 times higher etch rate of MH compared to PS. These results indicate that MH1,2k-b-PS4,5k is a promising BCP for nanolithographic applications below 10 nm.

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Publication details

The article was received on 18 Jul 2017, accepted on 12 Sep 2017 and first published on 12 Sep 2017


Article type: Paper
DOI: 10.1039/C7SM01429E
Citation: Soft Matter, 2017, Accepted Manuscript
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    Carbohydrate-based Block Copolymer Systems: Directed Self-Assembly for Nanolithography Applications

    I. Otsuka, N. Nilsson, D. B. Suyatin, I. Maximov and R. Borsali, Soft Matter, 2017, Accepted Manuscript , DOI: 10.1039/C7SM01429E

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