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Organic-Inorganic Hybrid Photoresists Containing Hexafluoroantimonate: Design, Synthesis and High Resolution EUV Lithography Studies

Abstract

Although many organic polymer based photoresists are useful for patterning high resolution sub-20 nm technology nodes, many of such resists suffer from poor sensitivity. One of the methods to address the problem of low sensitivity is to incorporate inorganic components into the organic polymer resist formulations. The present work demonstrates the incorporation of an inorganic counter ion moiety, hexafluoroantimonate, into an organic polymer photoresist, poly(4-(methacryloyloxy)phenyldimethylsulfoniumtriflate (poly-MAPDST), to improve its sensitivity. This approach resulted in two novel radiation sensitive hybrid non-chemically amplified resists (n-CARs), 1.5%-&2.15%-MAPDSA-MAPDST, having different percentages (1.5 % & 2.15 % respectively) of MAPDSA incorporated into poly-MAPDST backbone (where MAPDSA = (4-(methacryloyloxy)phenyl)dimethylsulfonium hexaflouroantimonate). These hybrid resists are sensitive towards extreme ultraviolet (EUV, λ = ̴ 13.5 nm) radiations and successfully patterned high resolution 20 nm lines as well as various complex nano features including nano-waves, nano-boats, line-elbows, nano-dots and circular patterns. The sensitivity exhibited by 1.5%-&2.15%-MAPDSA-MAPDST resists were calculated as 58.1 mJ/cm2 and 24.5 mJ/cm2 respectively from normalized remaining thickness (NRT) curve anaylsis, which reveals improved sensitivity as compared to poly-MAPDST resist.

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Publication details

The article was received on 30 Jul 2017, accepted on 11 Sep 2017 and first published on 12 Sep 2017


Article type: Research Article
DOI: 10.1039/C7QM00343A
Citation: Mater. Chem. Front., 2017, Accepted Manuscript
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    Organic-Inorganic Hybrid Photoresists Containing Hexafluoroantimonate: Design, Synthesis and High Resolution EUV Lithography Studies

    P. G. P. Reddy, P. Kumar, S. Ghosh, C. P. Pradeep, S. K. Sharma and K. E. Gonsalves, Mater. Chem. Front., 2017, Accepted Manuscript , DOI: 10.1039/C7QM00343A

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