Jump to main content
Jump to site search


High performance transparent in-plane silicon nanowire Fin-TFTs via a robust nano-droplet-scanning crystallization dynamics

Author affiliations

Abstract

High mobility, scalable and even transparent thin-film transistors (TFTs) are always being pursued in the field of large area electronics. While excimer laser-beam-scanning can crystallize amorphous Si (a-Si) into high mobility poly-Si, it is limited to small areas. We here demonstrate a robust nano-droplet-scanning strategy that converts an a-Si:H thin film directly into periodic poly-Si nano-channels, with the aid of well-coordinated indium droplets. This enables the robust batch-fabrication of high performance Fin-TFTs with a high hole mobility of >100 cm2 V−1 s−1 and an excellent subthreshold swing of only 163 mV dec−1, via a low temperature <350 °C thin film process. More importantly, precise integration of tiny poly-Si channels, measuring only 60 nm in diameter and 2 μm apart on glass substrates, provides an unprecedented transparent Si-based TFT technology to visible light, which is widely sought for the next generation of high aperture displays and fully transparent electronics. The successful implementation of such a reliable nano-droplet-scanning strategy, rooted in the strength of nanoscale growth dynamics, will enable eventually the batch-manufacturing and upgrade of high performance large area electronics in general, and high definition and scalable flat-panel displays in particular.

Graphical abstract: High performance transparent in-plane silicon nanowire Fin-TFTs via a robust nano-droplet-scanning crystallization dynamics

Back to tab navigation

Supplementary files

Publication details

The article was received on 20 Apr 2017, accepted on 17 Jun 2017 and first published on 20 Jun 2017


Article type: Paper
DOI: 10.1039/C7NR02825C
Citation: Nanoscale, 2017, Advance Article
  •   Request permissions

    High performance transparent in-plane silicon nanowire Fin-TFTs via a robust nano-droplet-scanning crystallization dynamics

    M. Xu, J. Wang, Z. Xue, J. Wang, P. Feng, L. Yu, J. Xu, Y. Shi, K. Chen and P. Roca i Cabarrocas, Nanoscale, 2017, Advance Article , DOI: 10.1039/C7NR02825C

Search articles by author

Spotlight

Advertisements