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Rapid, All Dry Procedure Microfabrication of Three-Dimensional Co3O4/Pt Nanonetwork for High-Performance Microsupercapacitors

Abstract

On-chip electrochemical energy storage devices have attracted growing attentions due to the decreasing size of electronic devices. Various approaches have been applied for constructing the microsupercapacitors. However, the microfabrication of high-performance microsupercapacitors by conventional and fully compatible semiconductor microfabrication technologies is still a critical challenge. Herein, the unique three-dimensional (3D) Co3O4 nanonetwork microelectrodes formed by the interconnection of Co3O4 nanosheets are constructed by a controllable physical vapor deposition combined with rapid thermal annealing. This construction process is an all dry and rapid (≤5 minutes) procedure. Afterward, through sputtering high electrical conductive Pt nanoparticles on the microelectrodes, the 3D Co3O4/Pt nanonetwork based microsupercapacitor is fabricated, showing a high volume capacitance (35.7 F cm-3) at a scan rate of 20 mV s-1 due to the unique interconnected structures, high electrical conductivity and high surface area of the microelectrodes. This microfabrication process is also used to construct the high-performance flexible microsupercapacitor, and it can be applied in the construction of wearable devices. The proposed strategy is completely compatible with current semiconductor microfabrication and shows a great potential in the applications of large-scale integration of micro/nano and wearable devices.

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Publication details

The article was received on 13 Mar 2017, accepted on 12 Jul 2017 and first published on 14 Jul 2017


Article type: Paper
DOI: 10.1039/C7NR01789H
Citation: Nanoscale, 2017, Accepted Manuscript
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    Rapid, All Dry Procedure Microfabrication of Three-Dimensional Co3O4/Pt Nanonetwork for High-Performance Microsupercapacitors

    X. Ma, S. Feng, L. He, M. Yan, X. Tian, Y. Li, C. Tang, X. Hong and L. Mai, Nanoscale, 2017, Accepted Manuscript , DOI: 10.1039/C7NR01789H

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