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Very large scale characterization of graphene mechanical devices using a colorimetry technique

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Abstract

We use a scalable optical technique to characterize more than 21 000 circular nanomechanical devices made of suspended single- and double-layer graphene on cavities with different diameters (D) and depths (g). To maximize the contrast between suspended and broken membranes we used a model for selecting the optimal color filter. The method enables parallel and automatized image processing for yield statistics. We find the survival probability to be correlated with a structural mechanics scaling parameter given by D4/g3. Moreover, we extract a median adhesion energy of Γ = 0.9 J m−2 between the membrane and the native SiO2 at the bottom of the cavities.

Graphical abstract: Very large scale characterization of graphene mechanical devices using a colorimetry technique

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Publication details

The article was received on 12 Mar 2017, accepted on 30 Apr 2017 and first published on 03 May 2017


Article type: Paper
DOI: 10.1039/C7NR01766A
Citation: Nanoscale, 2017, Advance Article
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    Very large scale characterization of graphene mechanical devices using a colorimetry technique

    S. J. Cartamil-Bueno, A. Centeno, A. Zurutuza, P. G. Steeneken, H. S. J. van der Zant and S. Houri, Nanoscale, 2017, Advance Article , DOI: 10.1039/C7NR01766A

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