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Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling

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Abstract

We developed an in situ measurement technique implemented on a Glow Discharge Optical Emission Spectrometry (GD-OES) instrument, which provides the depth information during the profiling process. The setup is based on a differential interferometer, and we show that a measurement accuracy better than 5% can be obtained for crater depths ranging from 100 nanometers to several tens of micrometers. This development can be directly applied to non-transparent coatings, and brings significant improvement to the quantification process in GD-OES.

Graphical abstract: Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling

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Publication details

The article was received on 13 Apr 2017, accepted on 21 Jun 2017 and first published on 21 Jun 2017


Article type: Paper
DOI: 10.1039/C7JA00146K
Citation: J. Anal. At. Spectrom., 2017, Advance Article
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    Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling

    S. Gaiaschi, S. Richard, P. Chapon and O. Acher, J. Anal. At. Spectrom., 2017, Advance Article , DOI: 10.1039/C7JA00146K

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