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Issue 5, 2017
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Electrochemical micro/nano-machining: principles and practices

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Abstract

Micro/nano-machining (MNM) is becoming the cutting-edge of high-tech manufacturing because of the increasing industrial demand for supersmooth surfaces and functional three-dimensional micro/nano-structures (3D-MNS) in ultra-large scale integrated circuits, microelectromechanical systems, miniaturized total analysis systems, precision optics, and so on. Taking advantage of no tool wear, no surface stress, environmental friendliness, simple operation, and low cost, electrochemical micro/nano-machining (EC-MNM) has an irreplaceable role in MNM. This comprehensive review presents the state-of-art of EC-MNM techniques for direct writing, surface planarization and polishing, and 3D-MNS fabrications. The key point of EC-MNM is to confine electrochemical reactions at the micro/nano-meter scale. This review will bring together various solutions to “confined reaction” ranging from electrochemical principles through technical characteristics to relevant applications.

Graphical abstract: Electrochemical micro/nano-machining: principles and practices

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Publication details

The article was received on 12 Oct 2016 and first published on 07 Feb 2017


Article type: Review Article
DOI: 10.1039/C6CS00735J
Citation: Chem. Soc. Rev., 2017,46, 1526-1544
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    Electrochemical micro/nano-machining: principles and practices

    D. Zhan, L. Han, J. Zhang, Q. He, Z. Tian and Z. Tian, Chem. Soc. Rev., 2017, 46, 1526
    DOI: 10.1039/C6CS00735J

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