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Issue 20, 2017
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Low energy electron-induced decomposition of (η3-C3H5)Ru(CO)3Br, a potential focused electron beam induced deposition precursor with a heteroleptic ligand set

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Abstract

Here we describe in detail low energy electron induced fragmentation of a potential focused electron beam induced deposition (FEBID) precursor, π-allyl ruthenium tricarbonyl bromide, i.e.3-C3H5)Ru(CO)3Br, specially designed to allow comparison of the effect of different ligands on the efficiency of low energy electron induced fragmentation of FEBID precursors. Specifically, we discuss the efficiency of dissociative electron attachment (DEA) and dissociative ionization (DI) with respect to electron-induced removal of the allyl, bromide and carbonyl ligands. We place this in perspective with a previous surface study on the same precursor and we propose a design strategy for FEBID precursor molecules to increase their susceptibility towards DEA.

Graphical abstract: Low energy electron-induced decomposition of (η3-C3H5)Ru(CO)3Br, a potential focused electron beam induced deposition precursor with a heteroleptic ligand set

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Publication details

The article was received on 16 Mar 2017, accepted on 02 May 2017 and first published on 02 May 2017


Article type: Paper
DOI: 10.1039/C7CP01696D
Citation: Phys. Chem. Chem. Phys., 2017,19, 13264-13271
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    Low energy electron-induced decomposition of (η3-C3H5)Ru(CO)3Br, a potential focused electron beam induced deposition precursor with a heteroleptic ligand set

    R. M. Thorman, J. A. Brannaka, L. McElwee-White and O. Ingólfsson, Phys. Chem. Chem. Phys., 2017, 19, 13264
    DOI: 10.1039/C7CP01696D

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