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Control of interfacial reactions for growth of high-quality AlN epitaxial films on Cu(111) substrates

Abstract

High-quality AlN epitaxial films have been epitaxially grown on Cu(111) substrates by pulsed laser deposition (PLD) through effectively controlling the interfacial reactions between AlN epitaxial films and Cu substrates. The interfacial property of as-grown AlN/Cu hetero-interfaces as well as their formation mechanisms has been systemically studied. A 2.1 nm-thick CuxAl1-xN interfacial layer is formed in AlN/Cu hetero-structures at the high growth temperature of 600 °C, while an abrupt and sharp AlN/Cu hetero-interfaces with no interfacial layer is achieved by effectively controlling the interfacial reactions at low growth temperature of 450 °C. The as-grown ~300 nm-thick AlN epitaxial films grown at 450 °C show very smooth surfaces with a root-mean-square surface roughness of 1.2 nm and high crystalline quality with full-width at half-maximum values of X-ray rocking curves for AlN(0002) and AlN(10-12) of 0.7° and 0.8°, respectively. Meanwhile, the residual stress in the as-grown AlN epitaxial films is also well controlled through low temperature growth with the residual compressive stress of 0.30 GPa. These high-quality AlN epitaxial films are of paramount importance for the commercial development of high-performance AlN-based optoelectronic devices.

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Publication details

The article was received on 15 Oct 2017, accepted on 09 Nov 2017 and first published on 09 Nov 2017


Article type: Paper
DOI: 10.1039/C7CE01803G
Citation: CrystEngComm, 2017, Accepted Manuscript
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    Control of interfacial reactions for growth of high-quality AlN epitaxial films on Cu(111) substrates

    W. Wang, Y. Zheng, Y. Li, X. Li, L. Huang, Z. Li, Z. Lu and G. Li, CrystEngComm, 2017, Accepted Manuscript , DOI: 10.1039/C7CE01803G

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