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Issue 40, 2017
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Synthesis of highly c-axis-oriented ZnO thin films using novel laser-enhanced electrospray CVD under atmospheric pressure

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Abstract

Highly c-axis-oriented ZnO nanostructured thin films were deposited by laser-enhanced electrospray chemical vapor deposition (laser ES-CVD) using alcohol-based solutions under atmospheric pressure. ZnO thin films are composed of c-axis-oriented single-crystalline ZnO columnar structures that grow perpendicular to the substrate on an upper ZnO polycrystalline layer. The morphologies drastically changed from sparse dendritic to dense columnar as a result of the addition of glacial acetic acid to the source solutions. The ZnO thin films had a good optical transmittance of more than 80% and an optical band gap of approximately 3.2 eV. ZnO columnar dense films had the highest Hall mobility, for which the carrier concentration was estimated to be 3.3 × 1017 cm−3 while the resistivity was approximately 9 Ω cm. This result suggests that the ZnO deposition process could be applied to practical material deposition.

Graphical abstract: Synthesis of highly c-axis-oriented ZnO thin films using novel laser-enhanced electrospray CVD under atmospheric pressure

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Publication details

The article was received on 20 Jul 2017, accepted on 22 Sep 2017 and first published on 22 Sep 2017


Article type: Paper
DOI: 10.1039/C7CE01333G
Citation: CrystEngComm, 2017,19, 5995-6001
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    Synthesis of highly c-axis-oriented ZnO thin films using novel laser-enhanced electrospray CVD under atmospheric pressure

    S. Suehiro, T. Kimura, D. Yokoe and S. Takahashi, CrystEngComm, 2017, 19, 5995
    DOI: 10.1039/C7CE01333G

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