Jump to main content
Jump to site search

CrystEngComm

Design and understanding of solid-state and crystalline materials

Paper

Control of grain size and crystallinity of poly-Si films on quartz by Al-induced crystallization

*
Corresponding authors
a
International Center for Materials Nanoarchitectonics, National Institute for Materials Science, Tsukuba, Japan
E-mail: SUBRAMANI.Thiyagu@nims.go.jp, FUKATA.Naoki@nims.go.jp
b
Institute of Applied Physics, University of Tsukuba, Tsukuba, Japan
CrystEngComm, 2017, Advance Article

DOI: 10.1039/C6CE02328B
Received 07 Nov 2016, Accepted 27 Feb 2017
First published online 01 Mar 2017
Please wait while Download options loads
 
 
This article has not yet been cited.

Supplementary Info