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Issue 20, 2016
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Large-scale arrays of single- and few-layer MoS2 nanomechanical resonators

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Abstract

We report the fabrication of large-scale arrays of suspended molybdenum disulfide (MoS2) atomic layers, as two-dimensional (2D) MoS2 nanomechanical resonators. We employ a water-assisted lift-off process to release chemical vapor deposited (CVD) MoS2 atomic layers from a donor substrate, followed by an all-dry transfer onto microtrench arrays. The resultant large arrays of suspended single- and few-layer MoS2 drumhead resonators (0.5–2 μm in diameter) offer fundamental resonances (f0) in the very high frequency (VHF) band (up to ∼120 MHz) and excellent figures-of-merit up to f0 × Q ≈ 3 × 1010 Hz. A stretched circular diaphragm model allows us to estimate low pre-tension levels of typically ∼15 mN m−1 in these devices. Compared to previous approaches, our transfer process features high yield and uniformity with minimal liquid and chemical exposure (only involving DI water), resulting in high-quality MoS2 crystals and exceptional device performance and homogeneity; and our process is readily applicable to other 2D materials.

Graphical abstract: Large-scale arrays of single- and few-layer MoS2 nanomechanical resonators

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Publication details

The article was received on 07 Feb 2016, accepted on 22 Apr 2016 and first published on 25 Apr 2016


Article type: Paper
DOI: 10.1039/C6NR01118G
Citation: Nanoscale, 2016,8, 10677-10685
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    Large-scale arrays of single- and few-layer MoS2 nanomechanical resonators

    H. Jia, R. Yang, A. E. Nguyen, S. N. Alvillar, T. Empante, L. Bartels and P. X.-L. Feng, Nanoscale, 2016, 8, 10677
    DOI: 10.1039/C6NR01118G

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