A reproducible low temperature chemical solution deposition of non-polar [110] and [100] ZnO films for optoelectronic applications
Abstract
ZnO films with non-polar a-plane (110) and m-plane (100) orientations are fabricated on Si (100) substrates by low temperature chemical solution deposition. This distinctive growth is achieved by a co-effect of the seed layer templates and CBD solution. The growth mechanism is illustrated in detail and these non-polar ZnO/Si heterostructures show an excellent unidirectional conductivity which is comparable with other one-dimensional ZnO heterostructures.