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Chemical Communications

Urgent high quality communications from across the chemical sciences.

Feature Article

Atomic and molecular layer deposition: off the beaten track

Corresponding authors
Chemical Engineering Department, Delft University of Technology, Van der Maasweg 9, 2629 HZ Delft, The Netherlands
E-mail: V.H.Bui@tudelft.nl
Tel: +31 15 27 88188
Chem. Commun., 2017,53, 45-71

DOI: 10.1039/C6CC05568K
Received 05 Jul 2016, Accepted 02 Oct 2016
First published online 03 Oct 2016
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