A chip-based microcavity derived from multi-component tellurite glass

Abstract

Construction of a chip-based optical microcavity from multi-component glass has long been a significant fundamental challenge in the cross field of materials science and photonics. Here we introduced a scalable non-hydrolytic sol–gel method for deposition of multi-component glass film with high thickness and superior homogeneity. Prototypically, we demonstrated success in the fabrication of multi-component tellurite thick film, and construction of the tellurite microcavity on a silicon chip through a combined etching technology for the first time. The collaborative studies by using the steady-state spectrum, whisper gallery mode (WGM) resonance spectrum and electric field distribution firmly indicate that the obtained thick film and microcavity present excellent properties, pointing to their promising applications in integrated photonics.