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Physical, chemical, and in vitro toxicological characterization of nanoparticles in chemical mechanical planarization suspensions used in the semiconductor industry: towards environmental health and safety assessments

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Corresponding authors
a
IBM Microelectronics, Systems and Technology Group, Hopewell Jct., USA
b
Arizona State University, School of Sustainable Engineering & The Built Environment, PO Box 873005, Tempe, USA
E-mail: p.westerhoff@asu.edu
Tel: +480 965 2885
c
University of Arizona, Tucson, USA
d
University of Texas at Dallas, Richardson, USA
e
North Carolina A&T State University, Greensboro, USA
f
Johns Hopkins University, Baltimore, USA
g
Clarkson University, Potsdam, USA
h
Intel Corporation, Santa Clara, USA
i
Colorado School of Mines, Golden, USA
j
University of Washington, Seattle, USA
Environ. Sci.: Nano, 2015,2, 227-244

DOI: 10.1039/C5EN00046G
Received 14 Mar 2015, Accepted 13 May 2015
First published online 14 May 2015

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