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Issue 22, 2014
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Photolithographic fabrication of high-performance all-solid-state graphene-based planar micro-supercapacitors with different interdigital fingers

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Abstract

Here we demonstrated the fabrication of ultrahigh rate, all-solid-state, planar interdigital graphene-based micro-supercapacitors (MSCs) manufactured by methane plasma-assisted reduction and photolithographic micro-fabrication of graphene oxide films on silicon wafers. Notably, the electrochemical performance of MSCs is significantly enhanced by increasing the number of the interdigital fingers from 8 to 32 and minimizing the finger width from 1175 to 219 μm, highlighting the critical importance of adjusting the number and widths of the fingers in the fabrication of high-performance MSCs. The fabricated graphene-based MSCs delivered an area capacitance of 116 μF cm−2 and a stack capacitance of 25.9 F cm−3. Furthermore, they offered a power density of 1270 W cm−3 that is much higher than that of electrolytic capacitors, an energy density of ∼3.6 mW h cm−3 that is comparable to that of lithium thin-film batteries, and a superior cycling stability of ∼98.5% capacitance retention after 50 000 cycles. More importantly, the microdevice can operate well at an ultrahigh scan rate of up to 2000 V s−1, which is three orders of magnitude higher than that of conventional supercapacitors.

Graphical abstract: Photolithographic fabrication of high-performance all-solid-state graphene-based planar micro-supercapacitors with different interdigital fingers

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Publication details

The article was received on 24 Feb 2014, accepted on 14 Mar 2014 and first published on 14 Mar 2014


Article type: Paper
DOI: 10.1039/C4TA00958D
Citation: J. Mater. Chem. A, 2014,2, 8288-8293
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    Photolithographic fabrication of high-performance all-solid-state graphene-based planar micro-supercapacitors with different interdigital fingers

    Z. Wu, K. Parvez, X. Feng and K. Müllen, J. Mater. Chem. A, 2014, 2, 8288
    DOI: 10.1039/C4TA00958D

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