Three-dimensionally ordered macroporous silicon films made by electrodeposition from an ionic liquid

Abstract

Three dimensionally ordered macroporous (3DOM) silicon films have been made via ordered polystyrene (PS) templates by electrodeposition from an ionic liquid (IL). For this purpose, the ionic liquid 1-butyl-1-methylpyrrolidinium bis(trifluoromethylsulfonyl)amide ([Py_1,4]Tf₂N) with SiCl₄ dissolved in it was used as an electrolyte and the electrodeposition of macroporous silicon could be achieved at room temperature (∼20 °C). Self-assembled PS colloidal crystals with different diameters were used as templates. Scanning electron microscopy and X-ray photoelectron spectroscopy confirm the quality of the samples, and the optical transmission measurement demonstrates that the 3DOM silicon film has a bandgap in the near infrared regime. Such a material has the potential to make 3DOM silicon feasible for electrical and optical applications.