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Paper

100 mm dynamic stencils pattern sub-micrometre structures

Veronica Savu,*a   Shenqi Xiea and   Juergen Bruggera  
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EPFL, BM 3.202, Station 17, Lausanne, Switzerland
E-mail: veronica.savu@epfl.ch;
Fax: +41 (0)21 693 6670 ;
Tel: +41 (0)21 693 0936
Nanoscale, 2011,3, 2739-2742

DOI: 10.1039/C1NR10083A
Received 21 Jan 2011, Accepted 06 May 2011
First published online 15 Jun 2011

This article is part of themed collection: Lithography
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