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Issue 7, 2011
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Polarisation stabilisation of vertical cavity surface emitting lasers by minimally invasive focused electron beam triggered chemistry

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Abstract

Local electron triggered reactions of functional surface adsorbates were used as a maskless, dry, and minimally invasive nanolithography concept to stabilize the polarisation of individual vertical cavity surface emitting lasers (VCSELs) on a wafer in a post-processing step. Using a 30 keV focused electron beam of a scanning electron microscope and injecting volatile organo-metallic (CH3)2Au(tfa) molecules, polarisation gratings were directly written on VCSELs by dissociating the surface adsorbed molecules. The electron triggered adsorbate dissociation resulted in electrically conductive Au-C nano-composite material, with gold nanocrystals embedded in a carbonaceous matrix. A resistivity of 2500 µΩcm was measured at a typical composition of 30 at.% Au. This material proved successful in suppressing polarisation switching when deposited as line gratings with a width of 200 nm, a thickness of 50 nm, and a pitch of 500 nm and 1µm. Refractive index measurements suggest that the optical attenuation by the deposited Au-C material is much lower than by pure Au thus giving a low emission power penalty while keeping the polarisation stable.

Graphical abstract: Polarisation stabilisation of vertical cavity surface emitting lasers by minimally invasive focused electron beam triggered chemistry

  • This article is part of the themed collection: Lithography
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Publication details

The article was received on 14 Jan 2011, accepted on 10 Feb 2011 and first published on 09 Mar 2011


Article type: Paper
DOI: 10.1039/C1NR10047E
Citation: Nanoscale, 2011,3, 2718-2722
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    Polarisation stabilisation of vertical cavity surface emitting lasers by minimally invasive focused electron beam triggered chemistry

    I. Utke, M. G. Jenke, C. Röling, P. H. Thiesen, V. Iakovlev, A. Sirbu, A. Mereuta, A. Caliman and E. Kapon, Nanoscale, 2011, 3, 2718
    DOI: 10.1039/C1NR10047E

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