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Polarisation stabilisation of vertical cavity surface emitting lasers by minimally invasive focused electron beam triggered chemistry

Corresponding authors
EMPA, Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, Thun, Switzerland
E-mail: Ivo.Utke@empa.ch
Fax: +41 21332284490
Tel: +41 332282957
Accurion GmbH, Göttingen, Germany
E-mail: pt@accurion.com
Fax: +49(0)5519996010
Tel: +49(0)551999600
EPFL SB ICMP LPN, PH D3 424 (Bâtiment PH), Station 3, Lausanne, Switzerland
E-mail: eli.kapon@epfl.ch
Fax: +41 216934525
Tel: +41 216933321
Nanoscale, 2011,3, 2718-2722

DOI: 10.1039/C1NR10047E
Received 14 Jan 2011, Accepted 10 Feb 2011
First published online 09 Mar 2011

This article is part of themed collection: Lithography
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