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Paper

Polarisation stabilisation of vertical cavity surface emitting lasers by minimally invasive focused electron beam triggered chemistry

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a
EMPA, Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, Thun, Switzerland
E-mail: Ivo.Utke@empa.ch;
Fax: +41 21332284490 ;
Tel: +41 332282957
b
Accurion GmbH, Göttingen, Germany
E-mail: pt@accurion.com;
Fax: +49(0)5519996010 ;
Tel: +49(0)551999600
c
EPFL SB ICMP LPN, PH D3 424 (Bâtiment PH), Station 3, Lausanne, Switzerland
E-mail: eli.kapon@epfl.ch;
Fax: +41 216934525 ;
Tel: +41 216933321
Nanoscale, 2011,3, 2718-2722

DOI: 10.1039/C1NR10047E
Received 14 Jan 2011, Accepted 10 Feb 2011
First published online 09 Mar 2011

This article is part of themed collection: Lithography
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