Jump to main content
Jump to site search

Issue 12, 2010
Previous Article Next Article

Controllable preparation of ultra-low-dielectric nanoporous silica via inorganic–organic hybrid templates

Author affiliations

Abstract

Four organic–inorganic hybrids were respectively synthesized via hydrosilylative addition reaction between octahydridosilsesquioxane (POSS) and linear dienes with different numbers of methylene groups, and well characterized by FTIR, 13C NMR and 29Si NMR technologies. It is confirmed that the hybrids have well-defined three-dimensional network structures with POSS cages uniformly dispersed in the networks. The four hybrids were then used as templates to produce silica films through an optimized spin-coating and calcination process. N2 sorption–desorption determination reveals that the silica films are nanoporous with a narrow pore distribution. Cross-section HRTEM images of the four films further confirm that the nanosize pores are evenly dispersed. SEM observation shows that the surfaces of the films are smooth and free of cracks or flaws. By altering the number of methylene groups of the dienes linking the POSS cages, pore size and porosity of the porous silica films are easily adjusted. After dehydroxylation treatment with trimethylchlorosilane (TMCS), the porous films show very low dielectric constants, which is closely related to the porosity of the film. This result reveals that the controllable preparation of low dielectric silica films has been achieved in this study.

Graphical abstract: Controllable preparation of ultra-low-dielectric nanoporous silica via inorganic–organic hybrid templates

Back to tab navigation

Publication details

The article was received on 08 Oct 2009, accepted on 04 Jan 2010 and first published on 10 Feb 2010


Article type: Paper
DOI: 10.1039/B920893C
Citation: J. Mater. Chem., 2010,20, 2469-2473
  •   Request permissions

    Controllable preparation of ultra-low-dielectric nanoporous silica via inorganic–organic hybrid templates

    B. Yang, H. Xu, Z. Yang and C. Zhang, J. Mater. Chem., 2010, 20, 2469
    DOI: 10.1039/B920893C

Search articles by author

Spotlight

Advertisements