Tantalum complexes with all nitrogen coordination sphere: mixed amido-, imido-, guanidinato complexes of tantalum and their thermal behaviour

Abstract

Novel mixed amido-/imido-/guanidinato-complexes of tantalum are reported. The complexes were synthesised by insertion reactions of carbodiimides of the type C(NR)₂ (R = iso-propyl (i-Pr)) into the M–N bonds of tantalum mixed amido/imido complexes. Three representative complexes were synthesised and fully characterised by ¹H-NMR, ¹³C-NMR, CHN-analysis and mass spectroscopy. The crystal structure of the complex [Ta(NMe₂){(i-Pr–N)₂C(NMe₂)}₂(N-t-Bu)] (1) (Me = methyl, t-Bu = tert-butyl) is presented and discussed. The complexes are solids that can be quantitatively sublimed at moderate temperatures (120–130 °C) without any sign of decomposition. The thermal properties of the new compounds were studied (TGA) and preliminary MOCVD-experiments were performed. TaN films were deposited and characterised by XRD and XPS.