Mononuclear precursor for MOCVD of HfO2 thin films

Arne Baunemann; Reji Thomas; Ralf Becker; Manuela Winter; Roland A. Fischer; Peter Ehrhart; Rainer Waser; Anjana Devi

doi:10.1039/B405015K

You do not have JavaScript enabled. Please enable JavaScript to access the full features of the site or access our non-JavaScript page.

Mononuclear precursor for MOCVD of HfO₂ thin films†

Arne Baunemann,^a Reji Thomas,^b Ralf Becker,^a Manuela Winter,^a Roland A. Fischer,^a Peter Ehrhart,^b Rainer Waser^b and Anjana Devi*^a

Author affiliations

* Corresponding authors

^a Inorganic Materials Chemistry Group, Lehrstuhl für Anorganische Chemie II, Ruhr-University Bochum, Universitätsstr. 150, D-44780 Bochum, Germany
E-mail: anjana.devi@ruhr-uni-bochum.de
Fax: +49 234 3224174
Tel: +49 234 3224150

^b Institut für Festkörperforschung/EKM, Forschungszentrum Jülich gmbH, D-52425 Jülich, Germany

Abstract

We report the precursor characteristics of a novel mononuclear mixed alkoxide compound [Hf(OⁱPr)₂(tbaoac)₂] and its application towards MOCVD of HfO₂ thin films in a production tool CVD reactor.

Download options Please wait...

Supplementary files

Article information

DOI: https://doi.org/10.1039/B405015K
Article type: Communication
Submitted: 06 Apr 2004
Accepted: 18 May 2004
First published: 17 Jun 2004

Download Citation

Chem. Commun., 2004, 1610-1611

Permissions

Request permissions

Mononuclear precursor for MOCVD of HfO₂ thin films

A. Baunemann, R. Thomas, R. Becker, M. Winter, R. A. Fischer, P. Ehrhart, R. Waser and A. Devi, Chem. Commun., 2004, 1610 DOI: 10.1039/B405015K

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Social activity

Fetching data from CrossRef.
This may take some time to load.

Chemical Communications