Issue 6, 2003
From the journal:

Journal of Analytical Atomic Spectrometry

Glow discharge optical emission spectrometry: moving towards reliable thin film analysis–a short review†

Johann Angeli,*a   Arne Bengtson,b   Annemie Bogaerts,c   Volker Hoffmann,d   Vasile-Dan Hodoroabae  and  Edward Steersf  

* Corresponding authors

a Microstructure and Surface Analysis, voestalpine Stahl GmbH, P.O.3, Linz, Austria
E-mail: johann.angeli@voestalpine.com

b Swedish Institute for Metals Research, Drottning Kristinas väg 48, SE-114 28 Stockholm, Sweden

c Department of Chemistry, University of Antwerp (UIA), Universiteitsplein 1, B-2610 Wilrijk-Antwerp, Belgium

d Leibniz Institute for Solid State and Materials Research Dresden, P.O. Box 270116, D-01171 Dresden, Germany

e Bundesanstalt für Materialforschung und -prüfung (BAM), Berlin, Germany

f London Metropolitan University, 166–220 Holloway Road, London, UK

Abstract

Glow discharge optical emission spectroscopy (GD-OES) is briefly reviewed, with particular reference to topics relevant to the application field of near surface and thin film analysis. The special needs and requirements for thin film analysis, in contrast to coating and bulk analysis, are pointed out. A task list is developed which shows the requirements of further developments to the technique and the fundamentals. The state-of-the-art is presented in measurement technique, GD source control and design, the effect of traces of molecular gases, correction and quantification procedures, contributions of modelling and, finally, reference materials for thin film analysis.

About
Cited by
Related
Download options Please wait...

Article information

DOI
https://doi.org/10.1039/B301293J
Article type
Review Article
Submitted
03 Feb 2003
Accepted
16 Apr 2003
First published
20 May 2003

J. Anal. At. Spectrom., 2003,18, 670-679

Permissions

Request permissions

Glow discharge optical emission spectrometry: moving towards reliable thin film analysis–a short review

J. Angeli, A. Bengtson, A. Bogaerts, V. Hoffmann, V. Hodoroaba and E. Steers, J. Anal. At. Spectrom., 2003, 18, 670 DOI: 10.1039/B301293J

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Social activity

Spotlight

Advertisements