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Issue 17, 2001
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Positive and negative photopatterning of metal oxides on silicon via bipolar electrochemical deposition

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Abstract

Negative and positive microscale patterning of metal oxides is efficiently and rapidly carried out on flat Si(100) surfaces via a simple white light assisted bipolar electrochemical process.

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Publication details

The article was received on 24 May 2001, accepted on 13 Jul 2001 and first published on 09 Aug 2001


Article type: Communication
DOI: 10.1039/B104586P
Citation: Chem. Commun., 2001,0, 1614-1615
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    Positive and negative photopatterning of metal oxides on silicon via bipolar electrochemical deposition

    H. C. Choi and J. M. Buriak, Chem. Commun., 2001, 0, 1614
    DOI: 10.1039/B104586P

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