Structures of (C5H5N)3Al(N3)3, [Me2N(CH2)3]2Al(N3) and Me2(N3)Al(H2NBut). Low-temperature OMVPE of AlN in the absence of ammonia
Abstract
New Lewis-base stabilized monomeric azido alanes are synthesized by salt metathesis from the corresponding chloro alanes and an excess of sodium azide; thin films of crystalline AlN are grown by OMVPE at 400–850 °C in vacuo.