Issue 17, 2016

Low energy ion scattering (LEIS). A practical introduction to its theory, instrumentation, and applications

Abstract

Low energy ion scattering (LEIS) probes the elemental composition of the outermost atomic layer of a material and provides static depth profiles of the outer ca. 10 nm of surfaces. Its extreme surface sensitivity and quantitative nature make it a powerful tool for studying the relationships between surface chemistry and surface related phenomena such as wetting, adhesion, contamination, and thin film growth. The high depth resolution obtained in LEIS in its static and sputter depth profile modes are useful for studying the layer structures of thin films. LEIS instrumentation has improved significantly in recent years, showing dramatic increases in its sensitivity and further expanding its potential applications. In this article, we provide a practical introduction to the technique, including a discussion of the basic theory of LEIS, LEIS spectra, LEIS instrumentation, and LEIS applications, including catalysts, solid oxide fuel cells (SOFCs), and thin films in integrated circuits.

Graphical abstract: Low energy ion scattering (LEIS). A practical introduction to its theory, instrumentation, and applications

Article information

Article type
Minireview
Submitted
15 Mar 2016
Accepted
01 Apr 2016
First published
05 Apr 2016

Anal. Methods, 2016,8, 3419-3439

Low energy ion scattering (LEIS). A practical introduction to its theory, instrumentation, and applications

C. V. Cushman, P. Brüner, J. Zakel, G. H. Major, B. M. Lunt, N. J. Smith, T. Grehl and M. R. Linford, Anal. Methods, 2016, 8, 3419 DOI: 10.1039/C6AY00765A

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