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Journal of microelectromechanical systems

Author:
Liu, Tingyi
ISSN:
1057-7157
Date:
04/2012
 
Volume: 21   Issue: 2   Page: 443-450
DOI:
10.1109/JMEMS.2011.2174421
Full Text Online from IEEE Electronic Library (IEL) ⓘ
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1992 - present
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