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Atomic layer deposition of transition metals.
Atomic layer deposition of transition metals.
Article, Chapter
Authors: Booyong S BS Lim
Publication: Nature Materials, Volume:2, Issue:11, Page(s):749-754
Published: 2003-11
ISSN: 1476-1122
DOI: 10.1038/nmat1000
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  • 2002-09-01~present; volume:1~present;issue:1~present
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  • 2002-09~present; volume:1~present;issue:1~present
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