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An atomic layer deposition reactor with dose quantification …
An atomic layer deposition reactor with dose quantification for precursor adsorption and reactivity studies.
An atomic layer deposition reactor with dose quantification for precursor adsorption and reactivity studies.
Article, Chapter
Authors: T J TJ Larrabee
Publication: Review of Scientific Instruments, Volume:84, Issue:1, Page(s):014102
Published: American Institute of Physics, 2013-1
ISSN: 0034-6748
DOI: 10.1063/1.4774042
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View Full Text Source:Review of Scientific Instruments,Review of Scientific Instruments,AIP Journals (Current Subscriptions) Opens in new Window
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Coverage:
  • 1930-01~present; volume:1~present;issue:1~present
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View Full Text Source:Review of Scientific Instruments,Review of Scientific Instruments,AIP (UKB 2022-2024) Opens in new Window
Journal:  Review of Scientific Instruments Source:AIP (UKB 2022-2024) Opens in new Window
Collection:  AIP (UKB 2022-2024) Opens in new Window
Coverage:
  • 1930~present; volume:1~present
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