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Simulating the atomic layer deposition of alumina from first…
Simulating the atomic layer deposition of alumina from first principles
Simulating the atomic layer deposition of alumina from first principles
Article, Chapter
Authors: Simon D. Elliott
Publication: Journal of Materials Chemistry, Volume:14, Issue:21, Page(s):3246-3250
Published: 2004-10-27
ISSN: 0959-9428
DOI: 10.1039/B405776G
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View Full Text Source:Journal of Materials Chemistry,Journal of Materials Chemistry,RSC Journal Archive Collection 1841-2007 Opens in new Window
Journal:  Journal of Materials Chemistry Source:RSC Journal Archive Collection 1841-2007 Opens in new Window
Collection:  RSC Journal Archive Collection 1841-2007 Opens in new Window
Coverage:
  • 1991~2007; issue:1~volume:17;issue:48~2007
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