Edit search
Role of Surface Termination in Atomic Layer Deposition of Si…
Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride.
Role of Surface Termination in Atomic Layer Deposition of Silicon Nitride.
Article, Chapter
Authors: Chaitanya Krishna CK Ande
Publication: Journal of Physical Chemistry Letters, The, Volume:6, Issue:18, Page(s):3610-3614
Published: American Chemical Society, 2015-9-17
ISSN: 1948-7185
  Full text availability for this item
Browse related articles
  Print copies at your library
  Request a copy of this item
Cite this item