Sign in
  Edit search
Atomic layer deposition: an overview.
Atomic layer deposition: an overview.
Article, Chapter
Authors: Steven M SM George
Publication: Chemical Reviews, Volume:110, Issue:1, Page(s):111-131
Published: American Chemical Society, 2010-1
ISSN: 0009-2665
DOI: 10.1021/cr900056b
  Full text availability for this item
View Full Text Source:Chemical Reviews,Chemical Reviews,American Chemical Society Journals (Front Files) Opens in new Window
Journal:  Chemical Reviews Source:American Chemical Society Journals (Front Files) Opens in new Window
Collection:  American Chemical Society Journals (Front Files) Opens in new Window
Coverage:
  • 1996-02-01~present; volume:96~present;issue:1~present
Report a broken link
Browse related articles
  Print copies at your library
Check Holdings in your Library Catalog
  Request a copy of this item
Cite this item