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Atomic layer deposition of a MoS₂ film.
Atomic layer deposition of a MoS₂ film.
Article, Chapter
Authors: Lee Kheng LK Tan
Publication: Nanoscale, Volume:6, Issue:18, Page(s):10584-10588
Published: 2014-9-21
ISSN: 2040-3372
DOI: 10.1039/c4nr02451f
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View Full Text Source:Nanoscale,Nanoscale,RSC Gold Collection excluding journal archive '1841-2007' 2022 Opens in new Window
Journal:  Nanoscale Source:RSC Gold Collection excluding journal archive '1841-2007' 2022 Opens in new Window
Collection:  RSC Gold Collection excluding journal archive '1841-2007' 2022 Opens in new Window
Coverage:
  • 2009~present; ;issue:1~present
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