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Design of an atomic layer deposition reactor for hydrogen su…
Design of an atomic layer deposition reactor for hydrogen sulfide compatibility.
Design of an atomic layer deposition reactor for hydrogen sulfide compatibility.
Article, Chapter
Authors: Neil P NP Dasgupta
Publication: Review of Scientific Instruments, Volume:81, Issue:4, Page(s):044102
Published: American Institute of Physics, 2010-4
ISSN: 0034-6748
DOI: 10.1063/1.3384349
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Coverage:
  • 1930-01~present; volume:1~present;issue:1~present
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View Full Text Source:Review of Scientific Instruments,Review of Scientific Instruments,AIP (UKB 2022-2024) Opens in new Window
Journal:  Review of Scientific Instruments Source:AIP (UKB 2022-2024) Opens in new Window
Collection:  AIP (UKB 2022-2024) Opens in new Window
Coverage:
  • 1930~present; volume:1~present
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